By Nadine Collaert
This ebook covers the most very important equipment architectures which were commonly researched to increase the transistor scaling: FinFET. beginning with idea, the publication discusses the benefits and the combination demanding situations of this gadget structure. It addresses intimately the themes reminiscent of high-density fin patterning, gate stack layout, and source/drain engineering, that have been thought of demanding situations for the mixing of FinFETs. The e-book additionally addresses circuit-related points, together with the impression of variability on SRAM layout, ESD layout, and high-T operation. It discusses a brand new machine idea: the junctionless nanowire FET.